Abstract
Design, fabrication and testing of a novel micromachined “quasi-digital” microflow regulator for integrated microfluidic systems. Operation relies on the use of a permanent magnet which interacts with an electrodeposited layer of Co–Ni on an array of V-shaped cantilever beams under a constant pressure. Each valve actuates as an on–off fluidic switch, opening or closing its corresponding microchannel. The flow can be adjusted to a set of different values (digital) by changing the position of the magnet. The microflow regulator has been designed, fabricated and experimentally tested showing a flow variation of 211% at a pressure of 160 mbar.
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