Abstract
For the fabrication of ultra cold neutron detectors a new deposition plant was purchased and assembled in 2006. It was recently decided to equip the system with a more versatile deposition setup and complement the already existing 7-hearth electron gun with 4 sputter guns and an ion gun. In addition, the entire vacuum system has been automated to facilitate its operation end exclude handling errors. Additionally it is planned to automate the deposition process to render the fabrication of extremely multilayered (several hundred layers) systems possible.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
