Abstract
Summary form only given. Vacuum deposition of metallic and metal oxide films is economically important in manufacturing products such as semiconductors, superconducting materials, optical component coatings, dielectric insulating coatings, and high-performance composite materials. Because of the high value of improved process measurements, along with the availability of new lasers and optical components, we have undertaken the development of an advanced laser spectrometer for metal vapor monitoring in vacuum deposition.
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