Design and analysis of monolithic integrated MEMS vector hydrophone micro-array

Abstract

Based on the high sensitivity and miniaturization advantages of MEMS vector hydrophone, we proposed and designed a monolithic integrated micro-array vector hydrophone composed of multiple sensor units. The theoretical model shows that the micro-array can improve the structural sensitivity and output signal-to-noise ratio while eliminating the problem of port and starboard ambiguity. Meanwhile, the micro-array structure clearly reduces the installation error of conventional vector array and improve the directional accuracy. Taking 5-element micro-array as an example, the resonance frequency in wet mode reaches 956 Hz that meets the requirement of test frequency band. Through theoretical and computational analysis, the sensitivity of micro-array is increased 14 dB and the SNR is increased 3.1 dB compared with that of the single vector hydrophone. The standing-wave tube experiment verified the directional effect of vector micro-array. The research of vector hydrophone micro-array is helpful to the application of underwater acoustic engineering.