Design and analysis of MEMS based piezoelectric micro pump integrated with micro needle

Abstract

This paper presents the design and simulation of piezoelectric micro pump integrated with micro needle. The proposed micro pump adopted rectangular piezoelectric vibrator supplied with an external alternating current voltage. It has four primary components: electrodes, piezoelectric plate, PDMS (polydimethylsiloxane) membrane and channel with inlet and outlet bottom up and whole setup is constructed on a glass base. The simulations are carried out by subjecting the developed model to voltage changes, material changes which shows the satisfactory results. The micro pump possesses a flow rate of 4.1 ml/min at an input voltage 10 V with frequency 300 Hz while it is integrated with Micro Needle is having 4.67 ml/min. High pumping rates at low applied voltages making the proposed model significantly important for Transdermal controlled drug delivery applications.