Design and Analysis of MEMS based Composite Piezoelectric Ultrasonic Transducer

Abstract

With the rapid gro wth of technology, micro scale devices are p laying a do minant role in mechanical and optoelectronic devices. Characteristics like min iaturization, mult iplicity and microelectronics help these devices to sense, control and actuate on micro scale with effects on macro scale. M icro devices like co mposite transducers are widely used in med ical, industrial and space applications because they are relatively simple and easy to interface with other devices and also provide better resolution and easy installation. The present work reports the design and simulat ion of composite piezoelectric ultrasonic transducer, where susceptance was computed by applying AC potential for various piezoceramic materials i.e., Nepec 6, Quart z, Pzt-8. In this, an eigen frequency analysis is fo llo wed by a frequency response analysis to calculate the input admittance as a function of the excitation frequency. To make this design, COMSOL Mult iphysics software is used. The transducer designed with PZT-8 has exh ibited better sensitivity than others. These transducers are widely used in non-destructive testing (NDT), weld ing, machin ing, medical imag ing etc.