Abstract
In this paper, we consider the design and analysis of an X–Y parallel piezoelectric-actuator-driven nanopositioner with a novel two-stage amplifying mechanism, where the mechanical design is optimized to achieve a large stroke and high-natural frequency for the purpose of high-performance servomechanism. The parallel kinematic X–Y flexure mechanism provides good geometric decoupling. The kinematic and dynamic analysis shows that the proposed design has a large work space and high bandwidth, which is further verified by finite-element analysis. The analysis results demonstrate that the designed nanopositioner has a large workspace more than 200 µm and a high-natural frequency at about 760 Hz. Furthermore, the dynamical model of the nanopositioner, including the dynamics of the PZT actuators, is also generated from the perspective of input/output transfer functions, and the parameters are identified by frequency-response experiments, which can be used for nano precision servomechanism.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
