Abstract
In this work, a novel design is proposed on a flexible thin sheet tilt mirror driven by four curved concentric piezoelec-tric actuators, which can deliver high performance motions with a more compact size and less complexity of structures compared with PZT stack based actuation methods. An analytical model of the tilt mirror is established to describe the output behavior base on Euler-Bernoulli theory and compliance matrix method. Numerical simulations based on finite element analysis (FEA) are also conducted to validate the performance of the proposed design and the effectiveness of the modeling method. The results demonstrate that the proposed tilt stage has a large rotational angle and compact sizing, which agrees well with the proposed model.
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