Abstract
This paper presents the design and analysis of a novel dual-mass microelectromechanical systems (MEMS) resonant output gyroscope (ROG), which can effectively eliminate the influence of common-mode disturbance, such as the linear acceleration, on the gyroscope working mode by the design of dual-mass form, as well as on the frequency outputs of the double-ended tuning fork (DETF) resonators by the differential arrangement. The concept of the ROG is introduced first. Then the dynamics of the gyroscope and the force-frequency characteristics of the DETF resonator are theoretically analyzed. By establishing the distribution coefficient of force and the reasonable equivalent of the force-frequency characteristics of the DETF resonator, the accurate expression of the device sensitivity is obtained. Based on the analysis results, the leverage mechanism and the DETF resonator are designed in detail. Then the configuration of the gyroscope, a dual-mass structure, is given. Finally, the validity of the analysis and design are verified by numerical simulations.
Highlights
With the development of microelectromechanical systems (MEMS) technology, the performances of the devices are greatly improved, and the sensors are widely used in various fields
It can be seen that the simulation result is very close to the analytic result, which verifies the accuracy of the structural design and theoretical analysis, especially the validity of the established distribution coefficient of force and the equivalent force-frequency characteristics of the double-ended tuning fork (DETF) resonator
We have presented the structural design and the theoretical analysis of a dual-mass MEMS resonant output gyroscope (ROG), which measured the Coriolis Force by direct frequency sensing instead of displacement sensing
Summary
With the development of microelectromechanical systems (MEMS) technology, the performances of the devices are greatly improved, and the sensors are widely used in various fields. As the motion of the Coriolis mass and the double-ended tuning fork (DETF) are mutually independent, the dynamics can be significantly simplified These benefits of the ROG attracted researchers’ increasing attention and research. The test results show that the scale factor can reach 4.04 Hz/(deg /s), but the drive-mode frequency of the Coriolis mass is only 31.59 Hz. It can be seen that the research on ROG is still in the stage of theoretical analysis and prototype preparation. We present a dual-mass MEMS ROG, which can significantly reduce the common mode error, such as temperature and acceleration, by using dual-mass and the differential output of the DETF resonators through the special design of leverage mechanisms. The theoretical analysis of the device is presented, including the dynamic of the gyroscope, the force-frequency characteristics of DETF resonator, as well as the mechanical sensitivity.
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