Abstract
We described an optical micro-electro-mechanical-system (MEMS) pressure sensor based on light intensity modulation that can be used in petrochemical and oil well area. The idea is to use light for transmission to replace electrical signals. Utilizing bulk micromachining technology of silicon, a membrane is obtained for sensing pressure and reflecting the light. The intensity of reflected light shifts when the membrane deforms caused by the loaded pressure. The intensity shift of reflected light can be measured by the photoelectric detection circuit that converts light intensity to voltage, so the loaded pressure can be gauged. The micro machining technology minimizes sensor size. Optical fiber is used to conduct light which makes the sensor be isolated from electricity. The sensor has been fabricated and encapsulated and the photoelectric detection circuit has been completed. The measurement range is 0~20MPa and the experimental sensitivity is 7.2mV/MPa.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.