Design and Analysis of a Micro Displacement Actuator Based on Stick-slip Principle Using Piezoelectric Ceramic

Abstract

This work introduces a triangular shape piezoelectric actuator using the principle of piezoelectric ceramic bending vibration and stick-slip motion. The lateral displacement of the driving foot is used to press the slider, while the vertical displacement is used to drive the slider. The structural dimensions are determined by simulation considering the required parameters. Finite element software is used to analyze the static performance. The dynamic performance of the actuator are simulated and analyzed, including its response to different input voltages and frequencies. Dynamic model provides a comprehensive understanding of the behaviour of the actuator during operation and further reveals the principle. The actuator combines piezoelectric bending vibration and stick-slip motion with the merits of compactness, high accuracy and fast response.