Abstract

This paper presents a novel piezoelectric energy harvester, which is a MEMS-based device. This piezoelectric energy harvester uses a bifurcate-shape. The derivation of the mathematical modeling is based on the Euler-Bernoulli beam theory, and the main mechanical and electrical parameters of this energy harvester are analyzed and simulated. The experiment result shows that the maximum output voltage can achieve 3.3V under an acceleration of 1g at 292.11Hz of frequency, and the output power can be up to 0.155mW under the load of 0.4MΩ. The power density is calculated as 496.79μWmm−3. Besides that, it is demonstrated efficiently at output power and voltage and adaptively in practical vibration circumstance. This energy harvester could be used for low-power electronic devices.

Highlights

  • MEMS-based energy harvesting, otherwise known its system size in millimeters or even smaller, is the process by which ambient energy has gained and converted into electricity to be used in small autonomous devices for making them self-sufficient

  • This paper presents a novel piezoelectric energy harvester, which is a MEMS-based device

  • The experiment result shows that the maximum output voltage can achieve 3.3V under an acceleration of 1g at 292.11Hz of frequency, and the output power can be up to 0.155mW under the load of 0.4MΩ

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Summary

INTRODUCTION

MEMS-based energy harvesting, otherwise known its system size in millimeters or even smaller, is the process by which ambient energy has gained and converted into electricity to be used in small autonomous devices for making them self-sufficient. In order to achieve the high voltage and power, the device may be mainly performed with electromagnetic, electrostatic and piezoelectric transducers. Comparing with the other two forms harvester, the piezoelectric transducer has a simpler structure, higher energy density, longer service life, and other advantages. The frequency of ambient vibration sources is typically 100∼300Hz.[3] Yan Cui[3] presented a new type energy harvester designed for high power at low frequencies, the resonant frequency is 260Hz while its maximum output power is 16.74nW when the load resistance is 15KΩ, which is too small for MEMS devices. Based on the above analysis, this work presents a novel piezoelectric energy harvester, which is a MEMS-based device, and this device uses a bifurcate-shape, which could work more efficiently in the low-frequency environment.

Theoretical design
Analysis of resonance frequency
Analysis of electrical performance
Characteristics of the resonance frequency
CONCLUSION
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