Abstract
The analysis of membrane mechanics and vibration response are decisive especially in modeling and fabrication of sensor. This paper presents a graphene as a membrane material with some mathematical formula that used in evaluate the model. A structural model of graphene membrane for NEMS capacitive nanophone was built in Comsol Multiphysics version 5.1. The membrane is designed as in circular shape with selective diameter and thickness. A comparative study with different membrane thickness is discussed thoroughly. The 0.3 nm graphene membrane shows the highest deflection as 90.0 µm while the thicker graphene membrane, 1.0 nm and 3.0 nm gives the less deflection which is 14.0 µm and 0.5 µm respectively. The graph of deflection and the natural frequency with the mode shapes are observed. It shows a linear relation between the deflection and applied pressure regardless the value of the thickness of graphene membrane.
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