Abstract
In order to increase surface quality and material removal efficiency, a 2-DOF vibration-assisted polishing device driven by piezoelectric actuators (PZTs) was developed. The matrix-based compliance modeling (MCM) method was used to calculate stiffness, and Lagrange’s method was used to analyze the natural frequency of the device. To make the 2-DOF vibration-assisted polishing device achieve better performance, the dimensions of the device were optimized by the Whale optimization algorithm (WOA). Meanwhile, FEA was used in simulation and analysis of the device. The open-loop testing results show that the 2-DOF vibration-assisted polishing device has the characteristics of large stroke and high resolution. The polishing experimental results show that vibration-assisted polishing can improve the surface quality and material removal rate.
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