Abstract
A vibration-assisted polishing device (VAPD) composed of leaf-spring and right-circular flexure hinges is proposed with the aim of realizing vibration-assisted machining along elliptical trajectories. To design the structure, energy methods and the finite-element method are used to calculate the performance of the proposed VAPD. An improved bacterial foraging optimization algorithm is used to optimize the structural parameters. In addition, the performance of the VAPD is tested experimentally. The experimental results indicate that the maximum strokes of the two directional mechanisms operating along the Z1 and Z2 directions are 29.5 μm and 29.3 μm, respectively, and the maximum motion resolutions are 10.05 nm and 10.01 nm, respectively. The maximum working bandwidth is 1,879 Hz, and the device has a good step response.
Highlights
Because of the sub-micron accuracy and nanoscale roughness of their surfaces, smooth and ultrasmooth parts receive much attention and are widely used in fields such as aerospace, defense, biomedicine, scientific instruments, and energy and in other important engineering fields
The flexure hinge (FH) deform in the direction of the output force, thereby resulting in the displacements given in Table III and driving the vibration-assisted polishing device (VAPD) movement
We examined the VAPD for step and sinusoidal responses to investigate the tracking performance of the motion stage
Summary
Because of the sub-micron accuracy and nanoscale roughness of their surfaces, smooth and ultrasmooth parts (or components) receive much attention and are widely used in fields such as aerospace, defense, biomedicine, scientific instruments, and energy and in other important engineering fields. Motion generator that had sub-nanometer resolution and a 100 kHz bandwidth and used it to process difficult-to-machine materials.[14,15] that device was driven to generate an elliptical motion track and its vibration direction and phase difference were fixed and could not be adjusted; as such, the applicability of the device was severely limited. Resonant devices can achieve extremely high operating frequencies, even ultrasonic ones (>20 kHz), but they have limitations such as fixed working frequency and motion parameters, slow heat dissipation, difficult closed-loop control, and poor motion accuracy. The off-line performance of the device is tested on an optical vibration-isolation platform
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