Abstract
The multi-degree-of-freedom high-precision positioning system (MHPS) is one of the key technologies in many advanced industrial applications. In this paper, a novel hyperbolic magnetic field voice coil actuator using a rhombus magnet array (HMF-VCA) for MHPS is proposed. Benefiting from the especially designed rhombus magnet array, the proposed HMF-VCA has the advantage of excellent force uniformity, which makes it suitable for multi-degree-of-freedom high-precision positioning applications. First, the basic structure and operation principles of the HMF-VCA are presented. Second, the six-degree-of-freedom force and torque characteristic of the HMF-VCA is studied by three-dimensional finite element analysis (3-D FEA). Third, the influence of structural parameters on force density and force uniformity is investigated, which is conducive to the design and optimization of the HMF-VCA. Finally, a prototype is constructed, and the comparison between the HMF-VCA and conventional VCAs proves the advantage of the proposed topology.
Highlights
The multi-degree-of-freedom high-precision positioning system (MHPS) is one of the key technologies in many advanced industrial applications, such as semiconductor lithography, scanning tunneling microscope, chemistry and biomedical science [1,2,3,4,5,6,7]
When an actuator works in multi-degree-of-freedom, will its output force in the driving direction be influenced by the motion in the other directions, but it will produce parasitic force and torque, which will reduce the magnetic levitation fine positioning stage (MLFPS)’s performance and increase the control system’s complexity [18]
The MLFPS is made up of a load stage, a fixed base, three vertical the magnetization is shown as arrows
Summary
The multi-degree-of-freedom high-precision positioning system (MHPS) is one of the key technologies in many advanced industrial applications, such as semiconductor lithography, scanning tunneling microscope, chemistry and biomedical science [1,2,3,4,5,6,7]. When an actuator works in multi-degree-of-freedom, will its output force in the driving direction be influenced by the motion in the other directions, but it will produce parasitic force and torque, which will reduce the MLFPS’s performance and increase the control system’s complexity [18]. Energies 2019, 12, x FOR PEER REVIEW independent from the six-degree-of-freedom motion, and in this paper the ability is named as force uniformity. In this this paper, paper,we weput putforward forwardaanovel novelhyperbolic hyperbolicmagnetic magneticfield fieldvoice voicecoil coilactuator actuator using using aa rhombus rhombus magnet magnet array array (HMF-VCA).
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