Abstract
An XY planar platform for nanoscale positioning objective is developed in this study. The platform is constructed with flexure hinge mechanism, and each axis of the platform is driven by piezoelectric stack actuator. Note that the entire structure of the platform for the two axes is on the same plane not like the usual XY platform piled up with independent axial structure. It is found mutual disturbance exists in such a planar platform by both ANSYS analysis and practical experiment. As the mutual disturbance is defined by an approximate linear function, and the nonlinear hysteresis effect is solved by means of the Preisach model, appropriate command signal is computed. The feedforward controller on the basis of the established hysteresis model, the PID-based feedback controller with the optimal gains searched by the Ziegler-Nichols method and the genetic algorithm, and the composite (feedforward+feedback) controller are designed and examined by experiment respectively. From the experimental results, it indicates each type of controller can achieve a certain level of accuracy. The composite controller, of course, performs best, and is able to reach the target of about 10nm for large stroke and 1nm for fine stroke. It concluded that the designed planar platform has the advantage of small space and low cost can still be controlled well to satisfy the nanoscale precision requirement.
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