Abstract

A new machine tool now in the final stages of development at Battelle, Pacific Northwest Laboratories uses a unique tool motion to produce diamond-turned surfaces of exceptionally high quality. Copper surfaces of revolution have been produced with a 12.3-A rms surface finish and a contour accuracy of 75 nm. The cutting tool is programmed to move in 4 nm increments along two axes: one linear (X) axis and one circular (Omega) axis. Exceptionally stiff and accurate control of the tool is possible with this system. In conjuction with a unique thermally stabilized air bearing spindle and machine calibration equipment, the Omega-X system permits a significant advance in the fabrication of optical-quality surfaces.

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