Abstract
Recent advances in fabrication have enabled radial-junction architectures for cost-effective and high-performance optoelectronic devices. Unlike a planar PN junction, a radial-junction geometry maximizes the optical interaction in the three-dimensional (3D) structures, while effectively extracting the generated carriers via the conformal PN junction. In this paper, we report characterizations of radial PN junctions that consist of p-type Si micropillars created by deep reactive-ion etching (DRIE) and an n-type layer formed by phosphorus gas diffusion. We use electron-beam induced current (EBIC) microscopy to access the 3D junction profile from the sidewall of the pillars. Our EBIC images reveal uniform PN junctions conformally constructed on the 3D pillar array. Based on Monte-Carlo simulations and EBIC modeling, we estimate local carrier separation/collection efficiency that reflects the quality of the PN junction. We find the EBIC efficiency of the pillar array increases with the incident electron beam energy, consistent with the EBIC behaviors observed in a high-quality planar PN junction. The magnitude of the EBIC efficiency of our pillar array is about 70% at 10 kV, slightly lower than that of the planar device (≈ 81%). We suggest that this reduction could be attributed to the unpassivated pillar surface and the unintended recombination centers in the pillar cores introduced during the DRIE processes. Our results support that the depth-dependent EBIC approach is ideally suitable for evaluating PN junctions formed on micro/nanostructured semiconductors with various geometry.
Highlights
PN junctions are fundamental device elements that have been extensively used in various applications, including integrated electronic circuits, optical sensors and detectors, and energy harvesting and conversion systems (Chu et al 2019; Sengupta et al 1998; Neudeck 1989)
We report measurements of radial PN junctions formed on Si micropillar arrays based on depthdependent electron-beam induced current (EBIC) microscopy
The magnitude of the EBIC efficiency of our pillar array is about 70% at 10 kV, slightly lower than that of the planar device (≈ 81%)
Summary
PN junctions are fundamental device elements that have been extensively used in various applications, including integrated electronic circuits, optical sensors and detectors, and energy harvesting and conversion systems (Chu et al 2019; Sengupta et al 1998; Neudeck 1989). Recent advances in micro/nanofabrication have enabled threedimensional (3D) architectures that offer design flexibility to produce high-performance optoelectronic devices using cost-effective semiconductors (Garnett and Yang 2010; Li 2012; Yoon et al 2010; Um et al 2015). These low-quality materials, exhibit short minority carrier diffusion lengths (Ln, p < 10 μm) due to high concentrations of impurities and structural defects (e.g., point defect, vacancy, dislocation, grain boundary), limiting device performance designed in a planar geometry. Our previous work demonstrated over twofold higher power conversion efficiencies with radial junction solar cells compared to their planar
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