Abstract
Depth resolved study of crystallization of CoFeB film on MgO film has been done using GIXRD measurements. The quality and thermal stability of MgO film deposited using EB evaporation, was ensured using GIXRD measurements. Depth selectivity for studying the crystallization of CoFeB film has been achieved by performing the GIXRD measurements as a function of the angle of incidence on as-deposited as well as annealed samples. GIXRD measurements on partially crystallized sample annealed at 300 °C reveal that the crystallization of CoFeB film occurs preferentially at CoFeB/MgO interface with the thickness of crystallized layer being 7 nm. This is in conformity with suggestions made in some earlier studies. Anomalous XRD measurements near the Fe absorption edge on completely crystallized sample achieved after annealing at 450 °C shows the presence of (1 0 0) superlattice peak. This evidences the formation of ordered bcc CoFe phase. This result is important as it has been suggested that an ordered CoFe bcc phase may improve the symmetry filtering effect and hence the Tunnel Magnetoresistance value.
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