Abstract
Ge films with a mean Ga content of about 8 and 1 at.% hole concentration can be fabricated by ion implantation and subsequent flash-lamp annealing. The Ge:Ga films become superconducting below critical temperatures in the range between 1 and 2 K depending on the film resistance. The change in the macroscopic transport properties during step-wise surface etching can be described by a homogeneously doped layer model. However, the Ga distribution is extremely heterogeneous on the nanoscale. Atom-probe tomography analyses reveal the presence of Ga-rich precipitates with Ga clusters of up to 10 000 atoms. Since no percolating Ga clusters exist, it can be supposed that the heavy doping of Ge enables a coherent superconducting state via the proximity effect.
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