Abstract

Abstract Depth-resolved soft X-ray photoemission spectroscopy (SXPS) is performed in which depth sensitivity is provided by use of a periodic multilayer [B4C (22.5 A)/W (17.1 A)40] that shows sizeable standing wave effects of ±∼50–60% for soft X-rays at hν≈750 eV. The photoelectron intensities of each element in the sample, including impurity overlayers, are sharply altered when the incidence angle is tuned over the Bragg condition, in excellent agreement with theoretical simulations. The angular dependence of the photoelectron intensity also shows unique chemical-state resolved behavior depending on the location of a given species in the multilayer structure. Depth-resolved SXPS with soft X-ray standing wave excitation should thus be a very useful tool for studying surface and interface chemical, electronic and magnetic properties.

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