Abstract
In this work, we used the soft X-ray resonant magnetic reflectivity to study the depth-resolved out-of-plane (oop) magnetization profile of a CoFeB/MgO sample with W/Ta cap layer after annealing at 400°C. It is a powerful technique to probe buried magnetic interfaces of ultra-thin films by combining the depth-resolved information of X-ray reflectivity with the species selectivity of X-ray magnetic circular dichroism. It allowed us to resolve the oop magnetization within a 1.36 nm thick CoFeB layer by the measurement of angle-dependent specular reflectivity at large scattering angles (up to 80°). We determined a graded magnetic distribution for both Fe and Co with a 20% increase at the interface with MgO, decreasing slightly over a thickness of 0.7 nm from MgO before it rapidly decreases to 50% at the interface with W. After applying a non-saturating magnetic field in the plane of the sample, we also quantified a similar magnetization profile with an inclined moment configuration. This indicates that the magnetization gradient is a robust property of the CoFeB layer in the studied sample.
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