Depth resolution of a laser profilometer based on photo-EMF detector

Abstract

Abstract A laser profilometer based on adaptive photo-EMF detector that can find application for testing optically rough surfaces is described. Depth resolution of the configuration is shown to depend on not only the coherence length of the wide-spectrum light source used, but also the interelectrode spacing of the detector and crossing angle of interfering beams. Experimental demonstration of the device having an approximately 10 mm resolution and using a GaAs photo-EMF detector and a superluminescent diode was performed in tests of multisurface reflecting object.