Abstract
We describe a method to determine the variationof strain with depth in a sample using Raman measurements. Themethod involves recording Raman spectra using incident lighthaving different absorption coefficients. These can beobtained using a single incident light frequency by adjustmentof the point of focus. The Raman spectra are then processedusing a Laplace transform to obtain the characteristic elasticstrain as a function of depth. The method is illustrated usingseveral model strain distributions. It is applicable topractical cases such as graded interfaces and strained/relaxedepitaxial layers.
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