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Abstract
The hydrogen depth profiling in solids has been done by elastic recoil detection (ERD) technique with multicharged 19F ion beam from a small Tandem Accelerator of 2×1.7MV. Details of the experimental technique are described. The depth resolution of about 230Å in the near-surface regions (similar 5000Å) is much better than that of ERD technique with 2.5MeV He beam and heavy ion beam of 30MeV.
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