Abstract
Hg1-x Cdx Te (MCT) multilayers grown by photoassisted metal organic chemical vapor deposition (MOCVD) utilizing the interdiffused multilayer process (IMP) have been investigated by secondary ion mass spectrometry (SIMS). The SIMS measurement used a primary ion beam of Cs and the detected secondary ions were of the form CsX+ (X=Cd, Te and Hg). The secondary ion intensity of CsHg+ was higher than that of Hg+ by about two orders of magnitude. CsX+ detection was shown to achieve excellent linearity with the content of Hg in a series of Hg1-x Cdx Te samples (x=0, 0.2, 0.3, 0.375 and 1.0). CsX+ detection by SIMS was proven to be a very useful technique for the evaluation of the thin multilayers in the MCT samples whose layers have 180 nm to 360 nm in thickness.
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