Depth Profiling and Compositional Study of Implanted Surface Layers and Nitride Multilayers by a Combined GDOES, NRA and RBS Analysis

Abstract

In a high number of practical applications the properties of the surface layers and coatings used to improve the performance and lifetime of mechanical parts are strongly related with the composition, structure and thickness of the treatment layers. In this work, several coatings deposited onto steel substrates by PVD and surface layers of different materials modified by ion implantation, have been studied by an appropriated combination of glow discharge optical emission spectrometry (GDOES), Rutherford backscattering spectrometry (RBS) and nuclear reaction analysis (NRA). The stoichiometry, layer thickness and concentration depth profiles of TiN/CrN multilayer coatings have been evaluated by GDOES and RBS. Depending on the synthesis parameters, interdiffusion between the TiN and CrN layers has been observed. In addition, the concentration profiles of light elements (C, N) implanted in titanium or stainless steel substrates have been quantified by GDOES and NRA analysis using specific nuclear reactions for each element. The present results show the combination of GDOES, NRA and RBS as a powerful method for the characterisation of surface treatments and coatings.