Abstract
The simulation of the depth profiles of low-energy electron beams was carried out using the electron gamma shower (EGS) Monte Carlo code. The model of the electron beam accelerator consists of a titanium foil, nitrogen gas layer, and target materials, and irradiation was performed with electron beams of energy from 100 to 1000 keV. The electron beam of 100 keV transferred about 60% of the energy to the titanium foil and the nitrogen gas layer, and energy deposition to target materials was approximately 20%. Simulation of the depth profiles in polyethylene multilayer films was carried out and compared with the profiles of radical concentration by ESR measurements with the electron beams of the energy of 200 keV and 100 keV, finding them in good agreement.
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