Abstract
The depth profiles of the atoms trapped in polycrystalline molybdenum after implantation of 12-keV H3+ to a dose of 0.95 C/cm2 at 440 K and 780 K, and of 2-keV He+ to 0.19 C/cm2 at 300 K, have been determined by measuring the energy spectra of backscattered protons with an incident energy of 40 keV. The ratio of the number density of trapped atoms to that of metal atoms reaches about 0.5 in each case. The major difference between the results for H and He is that the depth profile of implanted hydrogen has a peak at a depth slightly less than the projected H-ion range, while that of implanted helium peaks at a depth about 3 times longer than the projected He-ion range.
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