Abstract
A comparative study of two techniques to depth profile multilayer NiFe alloy coatings has been performed. Both conventional cross-sectioning with energy-dispersive x-ray imaging (EDX) and glow discharge optical emission spectroscopy (GDOES) sputter depth profiling methods have been compared in terms of analytical accuracy, spatial resolution, ease of use and ultimately overall cost. The advantages and disadvantages of each technique have been highlighted, and while both methods exhibit good compositional agreement, the GDOES technique offers great advantages in turn-around time due to the minimal sample preparation required. Additionally, where the overall coating is thin or individual layers are thin, then the spatial resolution of GDOES is much better than that of EDX. An objective definition for GDOES spatial resolution has been created based on the optimum resolution obtainable and represents the overall resolution minus the degradation due to crater shape. This is shown to be a factor of approximately four times better than the true spatial resolution, but nonetheless presents a useful baseline guide to what is actually observed. © 1997 by John Wiley & Sons, Ltd.
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