Abstract
The depth of origin of sputtered atoms is investigated for tungsten carbide as an example of a compound with two species of large difference in mass. The results are compared with those for the elemental species C and W. This work is an extension of our previous work on elemental targets. The Monte Carlo program TRIM.SP is applied to calculate the distribution of depth of origin and the dependencies of the mean depth of origin on the projectile energy, E, the angle of incidence, α, and target atomic species, for the bombardment with Ar in the energy range 0.1–100 keV. In addition, the change of the depth of origin distributions with bombarding fluence is studied with the dynamic Monte Carlo program TRIDYN.
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