Depth of information in photoelectron microscopy

Abstract

The depth of information is defined as the distance below the surface of a specimen from which information is contributed at a specified resolution. A simplified model of photoemission is used to explore the relationship between electron escape depths and depth of information in photoelectron microscopy (PEM or photoemission electron microscopy). The depth of information is equal to the escape depth when the escape depth is small relative to the instrument resolution. When the escape depth is large compared to the instrument resolution or when information is carried for example by reflected light, the image consists of well resolved surface detail at the instrument resolution and dimmer, more diffuse, images of detail below the surface. Thus the same sample can exhibit different depths of information depending on the image details of interest. Other mechanisms of transmitting information to the surface, for example induced topography, are discussed, and experimental examples are given.