Abstract
ABSTRACTChemical Vapour Deposition of tungsten on silicon dioxide by means of GeH4 reduction of WF6 is studied. The influence of the ambient gas on the nucleation of tungsten is examined. Experiments have been performed in both Ar and H2 ambient. It is found that an Ar ambient hinders nucleation on silicon dioxide in comparison with a hydrogen ambient. Adhesion of the film and uniformity over the wafer are acceptable for the films deposited in hydrogen ambient.
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