Abstract
Ni-base superalloy films were deposited on single crystal Ni-base superalloy substrates from the target with congruent alloy components by pulsed laser deposition (PLD) technique. In this study, substrate temperature, pulse energy, pulse repetition rate and deposition time were selected as independent variables to investigate the effect of each process parameter on structural characteristics of the Ni superalloy films. Micro structure and growth behavior of the films deposited under different process parameters were investigated with X-ray diffraction (XRD) and scanning electron microscopy (SEM).Ni-base superalloy films were deposited on single crystal Ni-base superalloy substrates from the target with congruent alloy components by pulsed laser deposition (PLD) technique. In this study, substrate temperature, pulse energy, pulse repetition rate and deposition time were selected as independent variables to investigate the effect of each process parameter on structural characteristics of the Ni superalloy films. Micro structure and growth behavior of the films deposited under different process parameters were investigated with X-ray diffraction (XRD) and scanning electron microscopy (SEM).
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