Abstract
In this study, we investigate the effects of radio frequency of power and gas flow rates on the chemical compositions of atmospheric He plasma. A customized plasma system was setup and equipped with a radio frequency power supply and an optical emission/absorption spectrometer to help characterizing the plasma. For the deposition of thin polymer films, lactic acid is chosen for its chemical stability, biocompatibility and biodegradability. The properties, compositions and microstructures of deposited films are also investigated to assure the success of deposition.
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