Abstract

Surface acoustic waves (SAWs) were utilized as an actuator source to deposit a thin film of conductive polymer material (poly-3,4-ethylenedioxythiophene–poly(styrenesulfonate)/PEDOT:PSS), which can be used as a flexible, transparent, and conductive film. A standing surface acoustic wave (SSAW) mode and high electrostatic force were used to generate a strong and stable atomization process, and efficient deposition conditions. Several parametrical studies were conducted by varying the particle concentration, droplet volume, input voltage, the distance between the SAW device and the collector electrode, and the number of the SAW's excitation electrode, in order to clarify the optimum atomization and deposition conditions. The SAW device's deposition performance was also characterized by measuring the deposition results with regard to film roughness and uniformity, and the throughput.

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