Deposition of metal layers on carbon assisted with the same metal's ion radiation

Abstract

The depth distribution of metals inserted into graphite by means of clean ion beam assisted deposition displays a dependence on the energy density deposited in the atomic collision cascade. Qualitative and quantitative element, phase and chemical analyses of (Cu, Co, Mo, W)/C structures have been conducted with Rutherford backscattering and X-ray photoelectron spectroscopy (XPS) methods. In experimental conditions which satisfy a “global” spike model chemical forces such as the heat of mixing, cohesive energy and probably other effects may be employed for the explanation of experimental data. XPS analysis shows that in the Mo/C system near 60% of metallic molybdenum and 40% of oxide MoO x ( x≈2) are formed while in the W/C system almost every atom of tungsten is oxidized.