Abstract
A PACIS (pulsed arc cluster-ion source) developed for high average cluster-ion currents is presented. The per- formance of the PACIS at different operational modes is de- scribed, and the suitability for cluster-deposition experiments is discussed in comparison with other cluster-ion sources. Maximum currents of mass-selected cluster ions of 3-6 nA of small Si − (n = 4-10) clusters and 0.3-0. 5n A of large Al +/− n (n = 20-70) clusters are achieved. The mass-selected cluster ions are soft-landed on a substrate at residual kinetic ener- gies lower than 1 eV/atom, and the samples are characterized by X-ray photoelectron spectroscopy and scanning tunneling microscopy. First results on the soft landing of magic Si − clusters on graphite are presented. PACS: 36.40.-c; 61.46.+w; 81.07.Nb
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