Deposition of La2Zr2O7 (LZO) films on NiW substrates by chemical solution deposition process

Abstract

In this paper, a new sulfuration process has been performed on the NiW substrate to obtain a c(2×2)-S superstructure. The results of auger electron spectroscopy (AES) and refection high-energy electron diffraction (RHEED) showed that the c(2×2)-S superstructure appeared on the NiW substrate after the new sulfuration process. The effect of the c(2×2)-S superstructure on forming texture in LZO films was studied, and the effect of heat treatment of LZO films was also studied. Optimization of heat treatment for LZO films was more important than preparing the c(2×2)-S superstructure on the surface of NiW substrates for the deposition of textured LZO films. The c(2×2)-S superstructure is helpful to improve the repeatability of textured LZO film deposition process on Ni–5at. %W substrates with chemical solution deposition.