Deposition of high-resolution Carbon/Carbon multilayers on large areas for X-ray optical applications

Abstract

To synthesize X-ray optical multilayers showing both high resolution and high reflectivity spacer and absorber materials with low absorption coefficients for the desired spectral range are required. Simulations of C/C multilayers with different period thicknesses, d, and single layer densities, ϱ, show that a reflectance R ([Cu]Kα)>80% and a resolving power of about λ/Δλ≈600 can be achieved for C/C layer stacks with d=3 nm and N=1000 periods.