Deposition of hard and adherent TiBCN films for cutting tools applications

Abstract

AbstractMetal cutting tools having wear resistant and chemically stable ceramic coatings are in many applications superior in performance to uncoated tools. Titanium boron carbon nitride (TiBCN) is a hard material particularly suitable as a protective coating for cutting tools due to its excellent properties, such as a high hardness and high wear and corrosion resistance, among other. TiBCN films were grown on Si (100) and high speed steel substrates by means of reactively pulsed DC magnetron sputtering technique. Two B4C‐ and two Ti‐targets, to which a pulsed DC voltage of middle frequency was applied, were used for the deposition of TiBCN. A chromium layer was first deposited to obtain a better adhesion of TiBCN to the substrates. The mechanical properties of these coatings deposited under different N2 contents were investigated. The substrates were biased through a medium frequency power supply. The bias voltage value was −90 V for all coatings. The total film thickness was maintained at approximately 2 µm. The hardness of the coatings increased with reduced nitrogen content, while the adhesion decreased from 40.8 to 24.2 N, and the wear rate increased from 0.154 to 0.744 × 10−16 m3/N.m, the latter probably caused by the low content of the self‐lubricating amorphous matrix of our coatings. However, the sample deposited by a nitrogen gas flow of 60 sccm presented a wear rate of four orders of magnitude smaller than the uncoated sample. The deposition method presented in this work seems very promising for the manufacture of TiBCN coatings.