Deposition of diamond-like carbon films by using liquid phase electrodeposition technique and its electron emission properties

Abstract

We have deposited diamond-like carbon (DLC) films by electrodeposition technique in methanol liquid. XPS showed the films mainly contain carbon. IR spectrum indicated that as-deposited films are hydrogenated carbon films, with the hydrogen mainly bonded to sp3 carbon. Raman measurement suggested that the films consisted of sp3 and sp2 carbon. The field emission (FE) property of DLC coated on Si has been measured. The field emission of DLC films started at an applied voltage of 160 V, compared with silicon tip arrays at 600 V, and an emission current of DLC films up to 55 μA at 360 V was achieved.