Abstract
Diamond-like carbon (DLC) films were deposited by ablation of frozen acetone with a 790-nm, 130-fs ultrashort pulsed laser. The films deposited at room temperature in vacuum were identified as DLC by Raman spectrum and other properties such as high electrical resistivity and chemical inertness. The sp 3 fraction of the DLC film was estimated to be about 41% from an electron energy loss spectroscopy (EELS) measurement. Optical emission was observed for comparing the plume generated by frozen acetone, frozen methanol, and graphite targets. Particles with flat surfaces were formed in a hydrogen atmosphere.
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