Abstract
Abstract The diamond deposition on a molybdenum substrate was examined in an ArH2 DC plasma jet adding C6H5Cl, C6H4Cl2 and C6H3Cl3 as the carbon sources, compared with adding C6H6 to to examine the effect of chlorine species on diamond deposition. Well-faceted high-quality diamond was formed from the ArC6H4Cl2H2 plasma jet. A small amount of graphite and/or amorphous carbon were identified on the surface of the deposits from other plasma jets. Hydrogen abstraction of surface-adsorbed chlorine, chlorine abstraction of surface-adsorbed hydrogen and/or dehydrochlorination play a dominant role in providing higher diamond deposition rates and the removal of graphite and/or amorphous carbon. Excess amounts of chlorine, however, seem to foster the deposition of non-diamond carbon phase.
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