Abstract
The deposition of Er or Eu doped Y 2 O 3 -P 2 O 5 thin films by an aerosol assisted MO-CVD atmospheric process is studied. 0.1 to 0.5 μm thick films were obtained on glass substrates in the temperature range 400°C-580°C. The rare earth luminescence is activated by post annealing. The properties of the films were discussed in function of the P 2 O 5 content. For high annealing post-deposition treatments the films with less than 15 Mol% P 2 O 5 tended to crystallise in the yttria phase. The YPO 4 phase appeared around 50 Mol% P 2 O 5 . Between these concentration limits the films appeared as a disordered composite Y-P-O phase and exhibited wide luminescence bands.
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