Abstract
Hard B-C-N mixed films were deposited by radio frequency (RF) sputtering using both hexagonal boron nitride (BN) and graphite (C) semicircular tareets. Vickers hardness, nano-indentation hardness and microwear resistance were evaluated. (1) The hardness of B-C-N mixed film is higher than that of C-N and B-N films. New hard B-C-N films were obtained under proper bias voltage and flow rate conditions. (2) Nano-indentation hardness showed similar results as Vickers hardness. Nano-indentation clarified the value on the hardness of the thin film, although Vickers hardness was influenced by the hardness of the substrate. (3)Microwear tests using an atomic force microscope demonstrated the excellent microwear resistance of B-C-N material element mixed film.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
