Abstract
In this study a novel approach using pulsed-DC plasma enhanced chemical vapour deposition (DC-PECVD) to incorporate tungsten oxide nanoparticles into diamond-like carbon coatings (DLC) thin film deposited on tappet valve (metallic substrate) was successfully achieved. The DLC-W film obtained by incorporating WO3 nanoparticles into DLC was characterized using scanning electron microscope/energy dispersive spectroscopy (SEM/EDS), X-ray diffraction (XRD), Raman spectroscopy, scratch test, Rockwell C indention test and nano-hardness measurement. The thickness, hardness and elastic modulus were measured as 789.11 ± 16 nm, 18.64 ± 0.11 GPa and 152.03 ± 2.1 GPa respectively. The ID/IG was 0.95, D and G peaks positioned at 1341.66 and 1562.17 cm−1 respectively and W2C was observed from the XRD. The coating had a low apparent COF of 0.075 and excellent adhesion properties.
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