Abstract
A method of RuO 2 film deposition on non-metallic supports, as vitreous silica and boron-silicate glasses, by decomposing ruthenium trichloride, is described. Results of x-ray diffraction, scanning electron microscopy, adhesion and electrical resistivity of thick and polycrystalline films, prepared at various temperatures, are presented and discussed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have