Abstract
In this paper, pure molybdenum (Mo) thin film has been deposited on blank Si substrate by DC magnetron sputtering technique. The deposition condition for all samples has not been changed except for the deposition time in order to study the influence of time on the thickness and surface morphology of molybdenum thin film. The surface profiler has been used to measure the surface thickness. Atomic force microscopy technique was employed to investigate the roughness and grain structure of Mo thin film. The thickness and grain of molybdenum thin film layer has been found to increase with respect to time, while the surface roughness decreases. The average roughness, root mean square roughness, surface skewness, and surface kurtosis parameters are used to analyze the surface morphology of Mo thin film. Smooth surface has been observed. From grain analysis, a uniform grain distribution along the surface has been found. The obtained results allowed us to decide the optimal time to deposit molybdenum thin film layer of 20–100 nm thickness and subsequently patterned as electrodes (source/drain) in carbon nanotube-channel transistor.
Highlights
In recent years, the researches in microelectromechanical systems (MEMS) have developed remarkably, following the advanced of nanotechnology
Average thickness can be determined by knowing the average step height (ASH) at any location in the scan area using surface profiler dektak150
In this work surface profiler and atomic force microscopy (AFM) have been used to characterize surface thickness, roughness, and grain analysis of Mo thin film deposited on Si substrate with different deposition time (5–85 minutes)
Summary
The researches in microelectromechanical systems (MEMS) have developed remarkably, following the advanced of nanotechnology. The development of lithographic processes enables the fabrication of a wide variety of material-based miniaturized devices [1,2,3,4]. These systems have a rising importance in the automotive industry, magnetic storage devices, and all of those applications where microsensors or microactuators are necessary. MEMS are 10–100 times smaller than macromachines; surface forces often exceed the volume forces and problems associated with friction/adhesion; wear and surface contamination become relevant. Tribological studies have a key role in the optimization of these components [5, 6]
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